Optics and Precision Engineering, Volume. 31, Issue 19, 2836(2023)
Magnetic field time-gate displacement sensor based on discrete winding and its error characteristics
Addressing the challenges in the manufacturing of high-precision displacement sensors, a magnetic-field time-gate displacement sensor based on discrete windings was proposed. Through a specific arrangement of discrete exciting windings and valid shape of the discrete inducing windings, the change law of induced displacement signals was controlled. High-precision displacement was achieved using a combined measurement method. Furthermore, the influence of errors in exciting signals and the installation errors of the sensor on the measurement precision was analyzed via theoretical modeling, simulated analysis, and experimental verification. The experiment results showed that the DC error and 2nd harmonic error were introduced directly within the pitch by the amplitude errors between the two excitation signals and installation errors, with the 2nd harmonic error being the primary contributor to the measurement errors. As installation errors increased, the 2nd harmonic error also increased. The most significant impact on the measurement error was found to be the deflection error along the Z axis, followed by the flip error along the Y axis, and the least impactful was the tilt error along the X axis. After error correction was applied, the peak-to-peak value of the measurement error was found to be 4.5 μm within 144 mm, and the resolution was determined to be 0.15 μm. The primary feature of the method proposed is that discrete exciting windings and inducing windings on a millimeter scale were used to achieve measurement precision on a micrometer scale. This approach was shown to significantly reduce the manufacturing challenges of the displacement sensor, providing academic value and practical value.
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Ziran CHEN, Hengxiao ZHANG, Zhiying HE, Hongyou CHEN, Haiyou YU. Magnetic field time-gate displacement sensor based on discrete winding and its error characteristics[J]. Optics and Precision Engineering, 2023, 31(19): 2836
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Received: Mar. 30, 2023
Accepted: --
Published Online: Mar. 18, 2024
The Author Email: HE Zhiying (he_zhiying@cqut.edu.cn)