Acta Photonica Sinica, Volume. 47, Issue 12, 1212003(2018)

Micro-cantilever Displacement Detection System Based on Fabry-Perot Interference

HUANG Jian*, ZHAN Wei-na, CHEN Yang-li, and LU Jing-qi
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    A method based on Fabry-Perot (F-P) interferometer is proposed to detect the displacement of the micro-cantilever of atomic force microscopy. A hemispherical F-P cavity composed of a spherical mirror and a micro-cantilever is designed. A single frequency laser is used as the light source. The laser beam is reflected multiple times in the hemispherical F-P cavity and returned to the original path to form an interference. According to the principle of multi-beam interference, the relationship between the interference intensity and the cavity length has been determined and the deflection of the micro-cantilever has been calculated by using the intensity demodulation method. Finally, a micro-cantilever displacement detection system has been built. The experiment obtained a linear fit of 99.9% in the working range of 30 nm, and the minimum displacement resolution of the micro-cantilever was 0.26 nm. The experimental results are consistent with the theoretical analysis, which proves the practicability of the system.

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    HUANG Jian, ZHAN Wei-na, CHEN Yang-li, LU Jing-qi. Micro-cantilever Displacement Detection System Based on Fabry-Perot Interference[J]. Acta Photonica Sinica, 2018, 47(12): 1212003

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    Paper Information

    Received: Aug. 11, 2018

    Accepted: --

    Published Online: Jan. 10, 2019

    The Author Email: Jian HUANG (709008668@qq.com)

    DOI:10.3788/gzxb20184712.1212003

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