Acta Optica Sinica, Volume. 28, Issue s1, 176(2008)

Near-Field Nanofabrication Technology Base on Local Field Enhancement Effect

Yan Feng*, Zhou Ming, Fan Xiaomeng, and Zhang Wei
Author Affiliations
  • [in Chinese]
  • show less

    A new technique base on femtosecond laser local field enhancement effect is proposed. Nanomachining of thin gold films was accomplished by coupling 800 nm femtosecond laser radiation with an atomic froce microscope Si3N4 tip in ambient air by the local field enhancement effect. Possible factors affecting this process are discussed like the speed of the fabrication and the laser fluence. At last we get the high spatial resolution of (~10 nm) (not possible with standard nanomachining techniques). The presented process provides an intriguing means for massive nanofabrication due to the flexibility in the substrate material selection and easy lithograph of complex pattern.

    Tools

    Get Citation

    Copy Citation Text

    Yan Feng, Zhou Ming, Fan Xiaomeng, Zhang Wei. Near-Field Nanofabrication Technology Base on Local Field Enhancement Effect[J]. Acta Optica Sinica, 2008, 28(s1): 176

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Lasers and Laser Optics

    Received: --

    Accepted: --

    Published Online: Aug. 16, 2008

    The Author Email: Feng Yan (tomcobra@263.net)

    DOI:

    Topics