Researching on ArF Oscillator Amplifier Excimer Laser

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Acta Optica Sinica, Volume. 17, Issue 2, 140(1997)

[in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]², [in Chinese]², and [in Chinese]²

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¹[in Chinese]

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Abstract Get PDF(in Chinese)

An ArF oscillator amplifier excimer laser was developted. Using a thyratron as a switch, discharge jitter of the laser system was effectivelly overcome through matching main charge and discharge circuits. It was achieved that amplify index 50 of the system, pulse energy 50 mJ, and a beam divergence lower than 0.20 mrad.

Keywords

amplifier oscillator ArF excimer laser

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Researching on ArF Oscillator Amplifier Excimer Laser[J]. Acta Optica Sinica, 1997, 17(2): 140

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Paper Information

Category: Lasers and Laser Optics

Received: Feb. 1, 1996

Accepted: --

Published Online: Oct. 31, 2006

The Author Email:

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology