Acta Photonica Sinica, Volume. 39, Issue s1, 72(2010)
Effect of Catalytic Agent on Fabricating SiO2 Thin Film
Based on TEOS system and sol-gel process,using solvent alcohol together with catalysts,the microstructure of SiO2 particles in the sol was exactly controlled.Silica coatings were prepared on glass and annealed.The films were characterized by ellipsometer and scanning electronic microscope respectively,the effect of Catalytic agent was investigated,the experimental results show that adjusting catalytic agent can effectively effect the structure of SiO2 thin film.
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JIN Rui-min, XIAO Dong-yue, CANG Li-min, YAN Tao, XU Jian-jun, HAN Xiang-ju. Effect of Catalytic Agent on Fabricating SiO2 Thin Film[J]. Acta Photonica Sinica, 2010, 39(s1): 72
Received: Dec. 24, 2010
Accepted: --
Published Online: May. 31, 2011
The Author Email: Rui-min JIN (jinruimin2004@163.com)