Chinese Journal of Lasers, Volume. 35, Issue s2, 328(2008)
Effect of 3/SiH4 Flow Rate Ratio on the Performance of Polysilicon/SiN Composite Solar Cell
SiN thin film has the passive role and the good nature of reducing the reflection, so it already be widely applied in the crystal silicon solar cell's fabrication technology. This paper deals with effect of NH3/SiH4 on the performance of solar cell. The test results show that NH3/SiH4 gas ratio affect the transforming efficiency and minority carrier lifetime of solar cell and optimized NH3/SiH4 is 11.5∶1.
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Zhao Haofeng, Wang Ling, Xie Aigeng, Yan Kai, Wu Hongyan, Liu Bin, Huang Tingli, Xiao Yuhui. Effect of 3/SiH4 Flow Rate Ratio on the Performance of Polysilicon/SiN Composite Solar Cell[J]. Chinese Journal of Lasers, 2008, 35(s2): 328
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