Optics and Precision Engineering, Volume. 27, Issue 9, 1935(2019)
Control system for an electromagnetic suspension and electrostatically drive rotating micro mirror
In order to realize the rotation control of an electromagnetic levitation micromirror from -180° to +180°, the electromagnetic levitation, electrostatic drive, and closed-loop angle control used in this system were studied. First, the stator and rotor structures were designed and fabricated. Then, the relationship between levitation height and the frequency and amplitude applied to the coil were simulated and tested. The experimental results showed good agreement with the simulation results. On the basis of the analysis of the driving principle of variable capacitance, the rotation control experiment was performed, which showed that the rotor can rotate under the energizing condition in the phase sequence. Finally, a closed-loop control system with high-precision capacitance detection was introduced. The experimental results show that when the excitation current p-p value is 0.5 A and the excitation frequency is 20 MHz, suspension of the rotor at height of 100 μm can control the specified angle and meet the control requirements of the electromagnetic suspension micromirror.
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XIAO Qi-jun, LUO Zhong-hui. Control system for an electromagnetic suspension and electrostatically drive rotating micro mirror[J]. Optics and Precision Engineering, 2019, 27(9): 1935
Received: May. 23, 2019
Accepted: --
Published Online: Oct. 14, 2019
The Author Email: Qi-jun XIAO (shawqj@126.com)