Acta Optica Sinica, Volume. 23, Issue 9, 1041(2003)
A Non-Silicon-Based 1×4 MEMS Optic Switch
A fiber optic switch based on a novel micro-electromechanical system (MEMS) technology is developed, allowing fast switch (<2 ms), excellent isolation (>50 dB) and wide bandwidth. Each switch module consists of an electromagnetically actuated gold coated silicon mirror rotating around a 100 μm diameter shaft and a miniature 5 V driven coil. Enabling technology is of precision EDM machining. The switch is scalable to 8×8 and allows the realization of high capacity cross connects.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. A Non-Silicon-Based 1×4 MEMS Optic Switch[J]. Acta Optica Sinica, 2003, 23(9): 1041