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Optics and Precision Engineering, Volume. 13, Issue 6, 674(2005)

A temperature sensor array based on flexible MEMS skin technology

[in Chinese]1... [in Chinese]1, [in Chinese]2 and [in Chinese]1 |Show fewer author(s)
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A temperature sensor array based on flexible MEMS skin technology[J]. Optics and Precision Engineering, 2005, 13(6): 674

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    Received: Sep. 1, 2005

    Accepted: --

    Published Online: Nov. 3, 2006

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology