Chinese Optics Letters, Volume. 9, Issue 1, 011201(2011)

Angle-deviation optical profilometer

Chen-Tai Tan, Yuan-Sheng Chan, Zhen-Chin Lin, and Ming-Hung Chiu
Author Affiliations
  • Department of Electro-Optical Engineering, National Formosa University, No. 64 Wunhua Road Huwei, Yunlin 632, China
  • show less

    We propose a new optical profilometer for three-dimensional (3D) surface profile measurement in real time. The deviation angle is based on geometrical optics and is proportional to the apex angle of a test plate. Measuring the reflectivity of a parallelogram prism allows detection of the deviation angle when the beam is incident at the nearby critical angle. The reflectivity is inversely proportional to the deviation angle and proportional to the apex angle and surface height. We use a charge-coupled device (CCD) camera at the image plane to capture the reflectivity profile and obtain the 3D surface profile directly.

    Tools

    Get Citation

    Copy Citation Text

    Chen-Tai Tan, Yuan-Sheng Chan, Zhen-Chin Lin, Ming-Hung Chiu. Angle-deviation optical profilometer[J]. Chinese Optics Letters, 2011, 9(1): 011201

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: 3d holographic display

    Received: Jul. 1, 2010

    Accepted: Aug. 16, 2010

    Published Online: Jan. 7, 2011

    The Author Email:

    DOI:10.3788/COL201109.011201

    Topics