Chinese Optics Letters, Volume. 7, Issue 6, 06534(2009)

Manufacturing and testing of a cubic SiC surface

Feng Yan1,2, Di Fan1, Binzhi Zhang1, Longhai Yin1, Ruigang Li1, and Xuejun Zhang1
Author Affiliations
  • 1Optical Technology Research Center, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
  • 2Graduate University of Chinese Academy of Sciences, Beijing 100049, China
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    The free surface and unrotational-symmetric surface optical elements have been applied more and more widely along with the development of optical design technology, although they are still difficult for manufacturing. In this letter, a SiC unrotational-symmetric aspheric surface whose surface equation is z=3\lambda(x3+y3)(\lambda=0.6328 \mum) has been introduced. The tilt abstraction is adopted to minimize the material removal. The surface figures are peak-to-valley (PV) value of 0.327\lambda and root-mean-square (RMS) value of 0.023\lambda. A non-null testing method based on digital mask is proposed to test this surface. The accuracy of the method is testified by the experiment of standard sphere testing.

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    Feng Yan, Di Fan, Binzhi Zhang, Longhai Yin, Ruigang Li, Xuejun Zhang. Manufacturing and testing of a cubic SiC surface[J]. Chinese Optics Letters, 2009, 7(6): 06534

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    Paper Information

    Received: Jul. 15, 2008

    Accepted: --

    Published Online: Jun. 8, 2009

    The Author Email:

    DOI:10.3788/COL20090706.0534

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