Acta Optica Sinica, Volume. 36, Issue 1, 123002(2016)

Research on Tunable Filter Based on Micro-Ring Resonators

Wu Danning*, Wu Yuanda, Wang Yue, An Junming, and Hu Xiongwei
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    Deep ultraviolet photolithography and inductively coupled plasma etching processes are adopted to fabricate the filters based on silicon-on-insulator micro-ring resonators, and the radius is only 5 μm. A fourchannel optical add-drop multiplexer based on single micro-ring is fabricated, and the size of the device is only 3000 μm×500 μm. The test results show that the device can perfectly realize the upload and download functions. The free spectral range is about 19.6 nm and the maximum extinction ratio is 19.76 dB. Meanwhile, a reconfigurable optical add-drop multiplexer based on dual racetrack micro-ring resonator is optimally designed and fabricated. The adjacent crosstalks of the two kinds of optical add-drop multiplexer based on single micro-ring and dual racetrack micro-ring respectively are tested, and the maximum adjacent crosstalks are -11.94 dB and -20.04 dB, respectively. Because there is no cross-section between the add-drop channels and the backbone in dual racetrack optical add-drop multiplexer, the adjacent crosstalk is apparently less than the single micro-ring optical add-drop multiplexer. PIN junction modulator based on dual racetrack micro-ring resonators is designed and fabricated. When the added voltage reaches 1.6 V, the resonant peak has a blue shift of 0.78 nm, finally the test results are analyzed.

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    Wu Danning, Wu Yuanda, Wang Yue, An Junming, Hu Xiongwei. Research on Tunable Filter Based on Micro-Ring Resonators[J]. Acta Optica Sinica, 2016, 36(1): 123002

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    Paper Information

    Category: Optical Devices

    Received: Jun. 6, 2015

    Accepted: --

    Published Online: Dec. 31, 2015

    The Author Email: Danning Wu (wudanning@semi.ac.cn)

    DOI:10.3788/aos201636.0123002

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