A study of laser recrystallization of SOM (Silicon On Metal) material

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Chinese Journal of Lasers, Volume. 17, Issue 7, 416(1990)

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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CW Ar+ laser irradiation was used to recrystallize a-Si film, and the grain was increased to more than 10×40μm2, the concentration profile of impurities became uniform and the electrical properties of SOM were improved significantly. The pressure transducer made of this material has a pressure sensitivity of 6 mV/V at the pressure range of 1 bar.

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pressure transducer SOM laser recrystsllization

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A study of laser recrystallization of SOM (Silicon On Metal) material[J]. Chinese Journal of Lasers, 1990, 17(7): 416

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Paper Information

Category: Laser physics

Received: Aug. 23, 1988

Accepted: --

Published Online: Nov. 12, 2007

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Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology