Optics and Precision Engineering, Volume. 24, Issue 12, 3005(2016)
Measurement of transmissive wavefront of long-focal length lens by computer-generated holography
To measure the transmissive wavefront of a long-focal length lens precisely, a novel Computer Generated Holography (CGH) was proposed by adding a binary diffractive optical element into the Zygo interferometer to provide a reference wavefront. The theory of transmissive wavefront measurement of large convex lens by using the CGH was introduced. A high precision computed holographic plane was designed and developed to apply in the measurement of the transmissive wavefront of the long-focal length lens. The theory analysis and practical test show that the proposed method has a lower systematic error, and the measuring repeatability of the CGH is better than 0.004λ (2σ RMS).The result is in agreement with that of common Fizeau interferometry, and verifies the feasibility of the proposed CGH. Finally, the measurement uncertainty due to the substrate error and hologram fabrication processes was analyzed, and the wavefront peak-valley error is less than λ/10. It concludes that the CGH method greatly shortens the airspace, improves measurement precision, and is of great importance for the wavefront measurement of long focal length lenses.
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WEI Xiao-hong, HE Yu-hang, GAO Bo, XU Kai-yuan, LI Qiang, CHAI Li-qun. Measurement of transmissive wavefront of long-focal length lens by computer-generated holography[J]. Optics and Precision Engineering, 2016, 24(12): 3005
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Received: Oct. 11, 2016
Accepted: --
Published Online: Jan. 23, 2017
The Author Email: Xiao-hong WEI (xhwei4@126.com)
CSTR:32186.14.