Acta Optica Sinica, Volume. 40, Issue 17, 1705001(2020)

Reconstruction Algorithm for Ptychographic Iterative Engine with Highly Tilted Illumination

Chengcheng Chang1,2,3, Xingchen Pan1,2, Hua Tao1,2, Cheng Liu1,2、*, and Jianqiang Zhu1,2
Author Affiliations
  • 1National Laboratory on High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2National Laboratory on High Power Laser and Physics, China Academy of Engineering Physics, Chinese Academy of Sciences, Shanghai 201800, China
  • 3University of Chinese Academy of Science, Beijing 100049, China
  • show less

    A high-precision reconstruction algorithm is proposed for ptychographic iterative engine (PIE) with highly tilted illumination. By replacing the highly tilted illumination with exiting light field of vertical illumination and modifying the optical transfer function in free space, a computing formula suitable for calculating the large-angle light propagation is obtained together with the corresponding iterative reconstruction algorithm. This proposed method successfully avoids the under-sampling of steep phase ramp of light beam on a sample plane while ensuring the computing accuracy for the diffraction intensity of the non-paraxial light beam on recording plane, overcoming the most significant technique problem that hinders the further improvement in reconstruction accuracy and the applications of single-shot PIE in various research fields.

    Tools

    Get Citation

    Copy Citation Text

    Chengcheng Chang, Xingchen Pan, Hua Tao, Cheng Liu, Jianqiang Zhu. Reconstruction Algorithm for Ptychographic Iterative Engine with Highly Tilted Illumination[J]. Acta Optica Sinica, 2020, 40(17): 1705001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Diffraction and Gratings

    Received: May. 6, 2020

    Accepted: May. 20, 2020

    Published Online: Aug. 26, 2020

    The Author Email: Liu Cheng (chengliu@siom.ac.cn)

    DOI:10.3788/AOS202040.1705001

    Topics