Acta Optica Sinica, Volume. 38, Issue 12, 1209001(2018)
Automatic Phase-Distortion Compensation Algorithm in Digital Holography
A method for the automatic phase-distortion compensation in digital holography is proposed, in which the image segmentation technique is used to automatically segment the detected objects, thus a phase mask is generated, and the phase-distortion in areas without containing the detected object region is further obtained. The least-squares fitting of phase-distortion based on the phase-distortion correction model is done and the automatic phase-distortion compensation is eventually achieved. In experiments, a built-in digital holographic inspection platform is established and the wafer surface measurement is conducted. The results show that the proposed method can be used to automatically correct phase-distortion.
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Chao Gao, Yongfu Wen, Haobo Cheng, Yingwei Wang. Automatic Phase-Distortion Compensation Algorithm in Digital Holography[J]. Acta Optica Sinica, 2018, 38(12): 1209001
Category: Holography
Received: Apr. 20, 2018
Accepted: Aug. 15, 2018
Published Online: May. 10, 2019
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