Acta Optica Sinica, Volume. 31, Issue 1, 112008(2011)
Digitized Foucault Tester for Quantitative Evaluation the Surface of Aspheric Optical Elements
A digital knife-edge testing system is established. The knife-edge testing system is used to quantificatively evaluate the wavefront of conicoid aspherical optical element. Root mean square (RMS) and peak-to-valley (PV) values of wavefront aberration of aspherical optical element are given. Measurement results of digital knife-edge testing system are compared with the measurement of interferometer. The measurement results show the consistency within 0.001 μm, which proves the feasibility of digital knife-edge testing system and the accuracy of the digital knife-edge testing system reported here. The measurement results are discussed in the end.
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Wang Xiaopeng, Zhu Rihong, Wang Lei, Xu Rongguo. Digitized Foucault Tester for Quantitative Evaluation the Surface of Aspheric Optical Elements[J]. Acta Optica Sinica, 2011, 31(1): 112008
Category: Instrumentation, Measurement and Metrology
Received: Mar. 23, 2010
Accepted: --
Published Online: Dec. 24, 2010
The Author Email: Xiaopeng Wang (E-mail)