The high reflector is usually used in laser gyroscope,high-energy laser system and other national defense fields.Surface defects are unavoidable in the process of processing,which will seriously damage the high-reflective film system and even the substrate,and seriously affect its performance.At present,the complex surface defects of the high reflector are still the focus of research.In view of the light scattering characteristics of the defects,an electromagnetic simulation model of repetitive continuous scratch defects with a triangular cross section is established by using the Finite Element Method (FEM).The variation of integral scattering intensity of defects with different sizes and the difference of detection spatial scattering distribution at different locations are studied when a Gaussian beam is incident,and the curve of light scattering intensity of defects is obtained.It can reflect the relationship between defect size and integral scattering distribution and the optimal detection location of spatial scattering.The research results can provide a theoretical guidance for the research of nondestructive detection methods for surface defects of the high reflector.