Opto-Electronic Engineering, Volume. 32, Issue 8, 28(2005)
Finite element analysis on the residual stress of thin film on components of deformable mirror
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Finite element analysis on the residual stress of thin film on components of deformable mirror[J]. Opto-Electronic Engineering, 2005, 32(8): 28
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