INFRARED, Volume. 44, Issue 1, 11(2023)

Micro-Raman Study of InSb Wafers

Wei BAI*, Yan JIN, Qian LI, Tao DONG, and Wei-lin SHE
Author Affiliations
  • [in Chinese]
  • show less

    The micro Raman scanning test was carried out on InSb wafer before and after heat treatment. A new characterization method of stress surface distribution of InSb wafer was developed. The transverse optical (TO) phonon scattering peaks of InSb before and after heat treatment are 179.3 cm-1 and 178.5 cm-1, respectively. The longitudinal optical (LO) phonon scattering peaks of are 188.8 cm-1 and 188.7 cm-1, respectively. The half-peak widths of characteristic peaks are 5.8 cm-1 and 5.0 cm-1, respectively. The half-peak widths of X-ray dual-crystal diffraction curves are 12.10--20.04 arcsec and 7.61--7.74 arcsec, respectively. For devices made of heat-treated InSb wafers, the increment of blind element is less after baking at 80℃ for 20 days, and the overall quantity is small. This indicates that the heat treatment releases the residual stress of the wafer, which has a favorable effect on the new blind pixel in the late suppression device, and lays a material foundation for the preparation of a new generation of infrared detector with ultra-high performance and ultra-large size.

    Tools

    Get Citation

    Copy Citation Text

    BAI Wei, JIN Yan, LI Qian, DONG Tao, SHE Wei-lin. Micro-Raman Study of InSb Wafers[J]. INFRARED, 2023, 44(1): 11

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: Sep. 19, 2022

    Accepted: --

    Published Online: Mar. 12, 2023

    The Author Email: Wei BAI (nwpubaiwei@163.com)

    DOI:10.3969/j.issn.1672-8785.2023.01.002

    Topics