Electronics Optics & Control, Volume. 26, Issue 6, 80(2019)
On Composite Control Method for Piezoelectric Ceramic Driving Platform
The hysteresis nonlinearity of piezoelectric ceramic driving platform affects its positioning accuracy and reduces the quality of such micro-nano manipulation systems as atomic force microscopy for scan imaging of micro/nanoscale samples.The hysteresis characteristics of piezoelectric ceramic driving platform are modeled by the least squares methodthus the cumbersome hysteresis model acquisition process is avoided.The composite control method combining feed-forward control with active disturbance rejection control is proposed.By setting the bandwidths of the expansion observer and the system controlthe purpose of eliminating hysteresis and improving the positioning accuracy of the platform is achieved.The experimental results show that the composite control method can effectively improve the system positioning control accuracy under the premise of ensuring system stability.
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ZHAO Qing-xu, WANG Yi-fan, WU Wen-peng, HU Zhen. On Composite Control Method for Piezoelectric Ceramic Driving Platform[J]. Electronics Optics & Control, 2019, 26(6): 80
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Received: Dec. 24, 2018
Accepted: --
Published Online: Jul. 10, 2019
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