Acta Optica Sinica, Volume. 33, Issue 4, 412003(2013)

Error Compensation Method for Mirror Symmetry Absolute Measurement

He Yuhang*, Chai Liqun, Chen Bo, Li Qiang, Wei Xiaohong, and Gao Bo
Author Affiliations
  • [in Chinese]
  • show less

    A method is proposed to compensate intrinsic error in mirror symmetry absolute measurement. Because of the limitation of rotation times in mirror symmetry absolute measurement, intrinsic error of cNθ terms occurs in reconstructed wavefronts of three flats. By adding a rotation with a different angle, the wavefront difference between two measurements before and after rotation is calculated, and the Zernike coefficients of cNθ terms can be obtained by coefficient equations due to rotation invariability of the form of Zernike polynomials in polar coordinates. Therefore the intrinsic error of cNθ terms may be compensated. Because the amount of cNθ terms is infinite, the compensated terms are decided in terms of the balance between accuracy and computing capacity. Computer simulation proves the validity of the proposed method.

    Tools

    Get Citation

    Copy Citation Text

    He Yuhang, Chai Liqun, Chen Bo, Li Qiang, Wei Xiaohong, Gao Bo. Error Compensation Method for Mirror Symmetry Absolute Measurement[J]. Acta Optica Sinica, 2013, 33(4): 412003

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Nov. 12, 2012

    Accepted: --

    Published Online: Mar. 22, 2013

    The Author Email: Yuhang He (hang_yu_he@163.com)

    DOI:10.3788/aos201333.0412003

    Topics