Acta Optica Sinica, Volume. 14, Issue 5, 539(1994)
A New Design of Normal Incidence Scanning Reflectometer
A new type of the normal incidence scanning reflectometer, in which a M-type prism is used to split light beam, has been designed and constructed. The incident angle is about 5° and the photon energy region is from 1.5 to 3.5 eV. The measurement is controlled automatically by a computer. The measureing precision is about 0.01.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A New Design of Normal Incidence Scanning Reflectometer[J]. Acta Optica Sinica, 1994, 14(5): 539
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