Optics and Precision Engineering, Volume. 24, Issue 9, 2240(2016)

Identification of coupling stiffness for MEMS gyroscope

CHEN Zhi-yong*... LIU Yue-chen, ZHANG Rong and ZHOU Bin |Show fewer author(s)
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    For identification of the coupling stiffness of MEMS (Micro-electro-mechanical System) gyroscopes, a identification method was proposed based on the frequency response characteristics of the drive-axis, sense axis, drive-to-rotation coupling and rotation-to-sense coupling. A dual-mass linear vibrating MEMS gyroscope with decoupled drive-to-sense and sense-to-drive displacement was designed. Based on simplified stiffness characteristics of the beams, the dynamic planar movement equations of the gyroscope were established and the drive-axis, sense-axis, drive-to-rotation and drive-to-sense transfer functions were derived. According to the coupling model, the sources of stiffness coupling were attributed to the stiffness error of specific beams. The drive-to-rotation coupling stiffness could be identified by the ratio of drive-to-rotation coupling to drive-axis frequency responses, and rotation-to-sense coupling stiffness could be identified by the ratio of drive-to-sense to sense-axis frequency responses. The frequency responses of the gyroscope were investigated by the proposed coupling stiffness identification method, and results show that coupling stiffness coefficients by drive-to-rotation and rotation-to-sense for the tested gyroscope are 0.14 N and 0.054 33 N, respectively. It concludes that the identification results provide references for laser trimming of the beams for gyroscopes.

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    CHEN Zhi-yong, LIU Yue-chen, ZHANG Rong, ZHOU Bin. Identification of coupling stiffness for MEMS gyroscope[J]. Optics and Precision Engineering, 2016, 24(9): 2240

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    Paper Information

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    Received: Apr. 12, 2016

    Accepted: --

    Published Online: Nov. 14, 2016

    The Author Email: Zhi-yong CHEN (chendelta@tsinghua.edu.cn)

    DOI:10.3788/ope.20162409.2240

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