K9 glass substrates were cleaned by using a new cleaning technology, and some single-layer and multilayer coatings were prepared with the various oxide materials and different film thickness by the electron-beam evaporation technique. Comparison between the new cleaning technology and the ordinary cleaning was made in the experiments, and it were found that the new cleaning technology improved the surface roughness and the damage threshold of the new cleaning procedure showed twice as large as that of the ordinary cleaning procedure. Two methods of plasma spark and micrograph were used to detect the laser damage. Laser damage thresholds were obtained by using 1-on-1 test and R-on-1 test.