The development of large-scale terahertz (THz) array detection chips is of great significance to the promotion of related imaging and security applications. Because of the compatibility of THz microbolometer array technology with readout circuits used for infrared camera, it is the first chip to realize terahertz camera and is becoming the mainstream of THz camera. We have been devoted to the research of microbolometer array chips at room temperature. The Nb5N6 microbolometer array device has attracted the attention of international academia and industry due to its simple operation, high sensitivity, fast response and easy integration of ultra-large arrays. This paper reviews and summarizes some key technical problems encountered in the design and fabrication of THz array detection chips with Nb5N6 microbolometer, such as substrate interference effect, design of efficient coupling structure, design of low-noise readout circuits, and packaging and integration of readout circuits. It provides a reference for the design and fabrication of large-scale THz array detection chips.