Acta Optica Sinica, Volume. 14, Issue 11, 1204(1994)
Soft-X-Ray multilayered Dispersive Elements
The preliminary results of making soft X-ray multilayered dispersive elementsare Presented. Based on the soft X-ray multilayered dispersive elements are of this groupthe fabrication procedure including the design, Performance simulation, coatingtechnique, and testing method is discussed through the preparation of Mo/Si and W/Simultilayer samples. These elements will be used in the researches of X-ray optics and Xray Spectroscopy.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Soft-X-Ray multilayered Dispersive Elements[J]. Acta Optica Sinica, 1994, 14(11): 1204