Acta Optica Sinica, Volume. 19, Issue 1, 106(1999)
Rigorous Diffraction Analysis for Small Periods Binary Optical System
A rigorous vector grating analysis approach-BKK approach, which can be used to analyze the big caliber and big view binary optical system, is introduced. This method is applied to calculate the diffraction efficiencies accurately for arbitrary grating profiles, incident angles, substrate indexes and wavelengths in the same order of grating period. The diffraction efficiencies are given and compared with scalar results.
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[in Chinese], [in Chinese], [in Chinese]. Rigorous Diffraction Analysis for Small Periods Binary Optical System[J]. Acta Optica Sinica, 1999, 19(1): 106