Chinese Journal of Lasers, Volume. 39, Issue 5, 502010(2012)

MOCVD Growth of AlGaInAs/AlGaAs Quantum Well for 852 nm Laser Diodes Studied by Reflectance Anisotropy Spectroscopy

Xu Huawei1,2、*, Ning Yongqiang1, Zeng Yugang1, Zhang Xing1, Zhang Jianwei1,2, Zhang Jian1,2, and Zhang Lisen1,2
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    The influence of the growth temperature and interruption time on the crystal quality of AlGaInAs/AlGaAs quantum well is investigated. The AlGaInAs/AlGaAs quantum well and whole 852 nm laser structures are grown by metal organic chemical vapor deposition (MOCVD). Reflectance anisotropy spectroscopy (RAS) and photoluminescence (PL) spectra are applied to measure the AlGaInAs/AlGaAs interfaces crystalline quality. The results show that high growth temperature will lead to indium segregation from AlGaInAs quantum well to AlGaAs barrier. By lowering the growth temperature and using of interruption time between AlGaInAs quantum well and AlGaAs barriers, the indium segregation effect can be effectively suppressed. The AlGaInAs/AlGaAs quantum well shows an abrupt interface and good crystalline quality under this growth conditions. With optimizing growth conditions, whole laser structures are grown. All the epilayer and growth process can be distinguished in situ by RAS transient spectra.

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    Xu Huawei, Ning Yongqiang, Zeng Yugang, Zhang Xing, Zhang Jianwei, Zhang Jian, Zhang Lisen. MOCVD Growth of AlGaInAs/AlGaAs Quantum Well for 852 nm Laser Diodes Studied by Reflectance Anisotropy Spectroscopy[J]. Chinese Journal of Lasers, 2012, 39(5): 502010

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    Paper Information

    Category: Laser physics

    Received: Dec. 29, 2011

    Accepted: --

    Published Online: Apr. 13, 2012

    The Author Email: Huawei Xu (xuhwciomp@163.com)

    DOI:10.3788/cjl201239.0502010

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