Acta Optica Sinica, Volume. 21, Issue 7, 853(2001)
Super-Resolution in 3-D Confocal Surface Profilometry
Based on super-resolution theory, the 3-D confocal surface profilometry and annular pupil filter are combined for analyzing the property of the 3-D profilometry. The results of computer simulation and experiment prove that this method can explore the axial dynamic range and improve transversal resolution of 3-D profilometry at decreasing axial resolution.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Super-Resolution in 3-D Confocal Surface Profilometry[J]. Acta Optica Sinica, 2001, 21(7): 853