Adaptive vibration-resistant techniques in interferometry

[in Chinese]; [in Chinese]; [in Chinese]

Infrared and Laser Engineering, Volume. 30, Issue 4, 292(2001)

[in Chinese]^*, [in Chinese], and [in Chinese]

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[in Chinese]

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External vibration can cause error in surface measurement and if it is severe enough the fringes will be completely washed out. Adaptive control to compensate the effects of vibration is an effective method to eliminate external disturbance. In this article, the latest developed methods of adaptive vibration-compensated interferometry are introduced and discussed.

Keywords

Adaptive vibration-resistant technique Electro-optical modulation Optical feedback Vibration

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[in Chinese], [in Chinese], [in Chinese]. Adaptive vibration-resistant techniques in interferometry[J]. Infrared and Laser Engineering, 2001, 30(4): 292

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Paper Information

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Received: Jan. 12, 2001

Accepted: --

Published Online: Apr. 28, 2006

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Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology