INFRARED, Volume. 42, Issue 1, 16(2021)
Research on Primary Ion Beam in SIMS Test
The influence of the parameters of the primary ion beam on the SIMS test is introduced. It is found that the choice of ion source is determined by the analysis element, the primary beam energy determines the depth resolution, the incident angle affects the sputtering yield, and the primary ion beam current density affects the sputtering rate. Therefore, in the SIMS test, the corresponding parameters need to be adjusted according to the different analysis purposes to obtain better resolution.
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LI Qian, SHI Jing-xia, WANG Cong, SHEN Chen, SHE Wei-lin. Research on Primary Ion Beam in SIMS Test[J]. INFRARED, 2021, 42(1): 16
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Received: Aug. 30, 2020
Accepted: --
Published Online: Aug. 19, 2021
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