Acta Photonica Sinica, Volume. 41, Issue 7, 790(2012)

PLMapping of the Epitaxial Wafer System Based on LabVIEW

CUI Linzhe*, LI Shuping, and KANG Junyong
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  • [in Chinese]
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    A set of semiconductors photoluminescence scanning(PLMapping)system using LabVIEW8 is summarized. In consideration of the spectra collected distortion originate from excessive weak fluorescent signal of epitaxial wafers, inhomogeneous background illumination noises and then the inaccurate physical parameters in spectra analysis and others, methods for optimizing system such as backlight deduction, sample isolation, Gaussian fitting are developed. The communication and control with the spectrometer and motorized is realized with the help of strong ability of instrument control such as calling DLL and ActiveX in LabVIEW. Owing to the same wonderful ability in data analysis and display, the process of measuring, read, analysis and realtime display is easily integrated into an interface, hence the optical property of sample on spatial discrimination is obtained effectively and efficiently. Finally luminance uniformity of epitaxial wafer is preliminary analyzed. Wavelengths agree with temperatures distribution, which affirm the importance of maintaining consistent temperature in growth chamber. It is a system friendly interfaced, easy to use, high realtime and built simply, which offers researcher accurate and rapid measurement.

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    CUI Linzhe, LI Shuping, KANG Junyong. PLMapping of the Epitaxial Wafer System Based on LabVIEW[J]. Acta Photonica Sinica, 2012, 41(7): 790

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    Paper Information

    Received: Jan. 9, 2012

    Accepted: --

    Published Online: Aug. 31, 2012

    The Author Email: Linzhe CUI (laocuidage@163.com)

    DOI:10.3788/gzxb20124107.0790

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