Acta Optica Sinica, Volume. 14, Issue 12, 1303(1994)
Phase Modulation and Phase-Locked Interference of the Instrument for Measuring Surface Roughness
This paper introduces a new interferometer for measuring the surface roughness based on the principle of differential polarization interferometry. A Faraday modulating system is used to modulate the phase between two interference light beams and the phase is detected by phase-locked interference. It has excellent stability even under normal condition, and rapid and nocontact measurement can be done without a special reference surface. The instrument can produce the surface profile and statistical data with height sensitivity 2 nm and lateral resolution 1.2 μm.
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[in Chinese], [in Chinese]. Phase Modulation and Phase-Locked Interference of the Instrument for Measuring Surface Roughness[J]. Acta Optica Sinica, 1994, 14(12): 1303