Infrared and Laser Engineering, Volume. 32, Issue 5, 452(2003)

Novel uncooled infrared detector with high speed and high sensitivity

[in Chinese]*, [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
Author Affiliations
  • [in Chinese]
  • show less

    A novel uncooled silicon capacitive infrared detector with high speed and sensitivity is introduced.The design idea and fabrication processes of this infrared detector are described in detail. The detector operates on infrared absorption by special gas sealed in a micro-cavity, which results in its micro-capacitance change. All fabrication processes are realized by MEMS technology. The experimental results indicate that the prototype samples have good sense of infrared signal.

    Tools

    Get Citation

    Copy Citation Text

    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Novel uncooled infrared detector with high speed and high sensitivity[J]. Infrared and Laser Engineering, 2003, 32(5): 452

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Dec. 9, 2002

    Accepted: Apr. 1, 2003

    Published Online: Apr. 28, 2006

    The Author Email:

    DOI:

    Topics