Infrared and Laser Engineering, Volume. 32, Issue 5, 452(2003)
Novel uncooled infrared detector with high speed and high sensitivity
A novel uncooled silicon capacitive infrared detector with high speed and sensitivity is introduced.The design idea and fabrication processes of this infrared detector are described in detail. The detector operates on infrared absorption by special gas sealed in a micro-cavity, which results in its micro-capacitance change. All fabrication processes are realized by MEMS technology. The experimental results indicate that the prototype samples have good sense of infrared signal.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Novel uncooled infrared detector with high speed and high sensitivity[J]. Infrared and Laser Engineering, 2003, 32(5): 452