Infrared and Laser Engineering, Volume. 31, Issue 3, 253(2002)
Design and optical performance of 256×256 multi-phase diffractive microlens arrays
The design and fabrication method for diffractive microlens array are studied. Based on the research achievement, 256×256 multi-phase diffractive microlens arrays are manufactured for 3～5 μm wavelength. Point spread function and diffractive efficiency of the designed multi-phase diffractive microlens arrays are measured. The diffractive efficiency of 8-phase and 16-phase quartz diffractive microlens arrays are 80.2% and 87.5% respectively, which suggests that the designed multi-phase diffractive microlens arrays can fulfill practical needs.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Design and optical performance of 256×256 multi-phase diffractive microlens arrays[J]. Infrared and Laser Engineering, 2002, 31(3): 253
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