Laser & Optoelectronics Progress, Volume. 57, Issue 11, 111430(2020)

Research Progress on Hyperdoped Silicon Photodetectors Fabricated by Femtosecond Laser

Xiaorong Jin, Qiang Wu*, Song Huang, Zixi Jia, Guanting Song, Xu Zhou, Jianghong Yao, and Jingjun Xu
Author Affiliations
  • Key Laboratory of Weak-Light Nonlinear Photonics, Ministry of Education, School of Physics and TEDA Institute of Applied Physics, Nankai University, Tianjin 300071, China
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    The photodetectors based on hyperdoped silicon exhibit advantages including high gain at low voltage, and broadband spectral response ranging from visible to near-infrared wavelengths. In this review, the mechanism of femtosecond laser hyperdoping is introduced, followed by the research progress on hyperdoped silicon photodetectors, especially the discussions on how to enhance device response, suppress dark current, improve lattice quality, and increase carrier mobility. Moreover, photodetectors are introduced for flexible optoelectronic applications. At last, the development prospects of photodetectors based on femtosecond laser hyperdoped silicon are forecasted.

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    Xiaorong Jin, Qiang Wu, Song Huang, Zixi Jia, Guanting Song, Xu Zhou, Jianghong Yao, Jingjun Xu. Research Progress on Hyperdoped Silicon Photodetectors Fabricated by Femtosecond Laser[J]. Laser & Optoelectronics Progress, 2020, 57(11): 111430

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Apr. 9, 2020

    Accepted: May. 8, 2020

    Published Online: Jun. 2, 2020

    The Author Email: Wu Qiang (wuqiang@nankai.edu.cn)

    DOI:10.3788/LOP57.111430

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