Spectroscopy and Spectral Analysis, Volume. 32, Issue 11, 3151(2012)

The Principle and Analysis of Micro-Fourier Transform Spectrometer Based on MEMS Micro-Mirror

CHEN Jian-jun*, ZHU Yong, LIU Bo, WEI Wei, ZHANG Jie, and WANG Ning
Author Affiliations
  • [in Chinese]
  • show less

    The present paper puts forward a novel micro-Fourier transform infrared spectrometer based on programmable MEMS micro-mirror. This design uses a MEMS micro-mirror and a slantwise reflector to replace the moving mirror system on traditional spectrometer. This paper analyzes the operating principle of this spectrometer and gives the simulation result to prove the feasibility of this method. The results show that the spectral resolution is less than 5 nm in near-infrared wave band, the wavelength accuracy is approximately 1 nm and the sampling period of this spectrometer is approximately 50 ms. This method can use Hadamard transform to improve the SNR.

    Tools

    Get Citation

    Copy Citation Text

    CHEN Jian-jun, ZHU Yong, LIU Bo, WEI Wei, ZHANG Jie, WANG Ning. The Principle and Analysis of Micro-Fourier Transform Spectrometer Based on MEMS Micro-Mirror[J]. Spectroscopy and Spectral Analysis, 2012, 32(11): 3151

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: May. 9, 2012

    Accepted: --

    Published Online: Nov. 22, 2012

    The Author Email: Jian-jun CHEN (jianjchen@hotmail.com)

    DOI:10.3964/j.issn.1000-0593(2012)11-3151-04

    Topics