Optoelectronics Letters, Volume. 12, Issue 4, 241(2016)
Fabrication of ordered micro- and nano-scale patterns based on optical discs and nanoimprint
A simple method to fabricate one-dimensional (1-D) and two-dimensional (2-D) ordered micro- and nano-scale patterns is developed based on the original masters from optical discs, using nanoimprint technology and soft stamps. Polydimethylsiloxane (PDMS) was used to replicate the negative image of the 1-D grating pattern on the masters of CD-R, DVD-R and BD-R optical discs, respectively, and then the 1-D pattern on one of the PDMS stamps was transferred to a blank polycarbonate (PC) substrate by nanoimprint. The 2-D ordered patterns were fabricated by the second imprinting using another PDMS stamp. Different 2-D periodic patterns were obtained depending on the PDMS stamps and the angle between the two times of imprints. This method may provide a way for the fabrication of complex 2-D patterns using simple 1-D masters.
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GUO Hui-jing, ZHANG Xiao-liang, LI Xiao-chun. Fabrication of ordered micro- and nano-scale patterns based on optical discs and nanoimprint[J]. Optoelectronics Letters, 2016, 12(4): 241
Received: Apr. 19, 2016
Accepted: --
Published Online: Oct. 12, 2017
The Author Email: Xiao-liang ZHANG (zhangxiaoliang@tyut.edu.cn)