Acta Optica Sinica, Volume. 16, Issue 10, 1471(1996)
Preparation and Static Property Study of Phase Change Thin Film Ge2Sb2Te5in the Short Wavelength Region
The preparation method and stalic property of phase change optical storage Ge 2Sb 2Te 5 thin film have been analysed. After measuring its static properties, we found that the Ge 2Sb 2Te 5 film can be written and erased within 100 ns. Through multilayer design, the write/erase cycle numbers can be as high as 10 6, and the reflectivity contrast is above 15%.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Preparation and Static Property Study of Phase Change Thin Film Ge2Sb2Te5in the Short Wavelength Region[J]. Acta Optica Sinica, 1996, 16(10): 1471