Laser & Optoelectronics Progress, Volume. 46, Issue 7, 36(2009)
Polymer Material for Optical Waveguide Used in Integrated Circuit
The waveguide material based on host point of optical interconnection is summarized, and the most suitable materals, fluorinated polyimide and polyorganosilo-oxane, for integrated circuit are introduced. Some basic work for the further research of large scale integration is reviewed.
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Wen Changli, Ji Jiarong, Dou Wenhua, Song Yansheng. Polymer Material for Optical Waveguide Used in Integrated Circuit[J]. Laser & Optoelectronics Progress, 2009, 46(7): 36
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