Electro-Optic Technology Application, Volume. 27, Issue 6, 51(2012)

Research on Sensing Characteristics of Low-frequency Acoustic of Optical Fiber MEMS

ZHOU Da-hua1, ZONG Si-guang1, and JIANG Bing-li2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    Optical fiber MEMS sensor is a new sensor combined with MEMS micromachining and micro-optics technology, which has the advantages of miniaturization, strong anti-electromagnetic interference, ease of integration, easy to form array, low cost and high reliability. According to the need of low-frequency acoustic field measurements, the acoustic measurement theory of optical fiber MEMS is researched. The theoretical model of Fabry-Perot (F-P) interference measurement acoustic is built. And low-frequency acoustic sensor samples of optical fiber MEMS are designed and manufactured. The test result shows that the performance of optical fiber MEMS can meet high sensitivity acoustic measurement requirement in the band of 4 ~5 000 Hz.

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    ZHOU Da-hua, ZONG Si-guang, JIANG Bing-li. Research on Sensing Characteristics of Low-frequency Acoustic of Optical Fiber MEMS[J]. Electro-Optic Technology Application, 2012, 27(6): 51

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    Paper Information

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    Received: Oct. 23, 2012

    Accepted: --

    Published Online: Jan. 14, 2013

    The Author Email:

    DOI:

    CSTR:32186.14.

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