Acta Photonica Sinica, Volume. 50, Issue 6, 3(2021)
Femtosecond Laser Single-pass High Quality Direct Cutting Thin Quartz Glass Process Based on Filament Effect(Invited)
A one-step direct cutting method of 200 μm quartz glass using high-repetition frequency femtosecond laser combined with scanning galvanometer based on filament effect was proposed. Through the optimization of the processing process parameters, the fast and high-quality cutting of thin quartz glass is realized. The processing speed can be achieved 10 mm/s, the edge chipping is less 7.5 μm, and the roughness of the cross section is achieved 1 μm. The method realizes the simultaneous improvement of thin glass cutting efficiency and quality, and has a good application prospect in the field of laser processing.
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Kai LIAO, Wenjun WANG, Xuesong MEI, Bin LIU. Femtosecond Laser Single-pass High Quality Direct Cutting Thin Quartz Glass Process Based on Filament Effect(Invited)[J]. Acta Photonica Sinica, 2021, 50(6): 3
Category: Special Issue for Ultrafast Laser Precision Machining of Hard and Brittle Materials
Received: Apr. 12, 2021
Accepted: May. 28, 2021
Published Online: Aug. 31, 2021
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