Oleic acid modified LaF3∶Er,Yb nanoparticles were prepared and doped in organic-inorganic hybrid material as the active layer of waveguide amplifier. Polymethyl-methacylate-glyciclyl-methacrylate, an excellent and transparent optical polymer material, was used as the top and bottom layers. During the process of waveguide fabrication, the reason why active layer cannot be etched were instructed. And an embedded ridge structure waveguide amplifier was also designed. The device was fabricated by aluminium mask vacuum evaporation, UV lithography and reactive ion etching method (RIE) process.Waveguide end-faces were polished in order to get high gain. At last, a 3.2 dB relative gain was obtained in a 1.9 cm length sample (signal power was 1mw and pump power was 188 mW).