Acta Optica Sinica, Volume. 34, Issue 6, 612011(2014)
Implementation of Real-Time Displacement Precision Measurement Technology for Sinusoidal Phase-Shifting Laser Self-Mixing Interferometer
In order to improve the measurement accuracy and realize the real-time mesurement speed of the laser self-mixing interferometer in a large range of displacement, advanced sinusoidal phase-shifting technique and the time-domain phase demodulation method are adopted. The electro-optic crystal modulator is used to realize the sinusoidal phase-shifting on the laser beam in the external cavity and the interference signal′s phase will be demodulated by the time-domain phase demodulation method. By combining the two together, it can meet the speed requirement in a wide range of displacement measurement process and implement the interferometer′s real-time measurement requirement at the same time. Experimentally, PI′s high-precision commercial electric displacement platform calibration results verified the sinusoidal phase modulation laser seif-mixing interferometer′s displacement measurement precision can reach less than 0.5 μm in the hundred mm large-scale displacement measuring process. In addition, the factors affecting the interferometer′s measurement speed in the real-time displacement measurement process is analyzed and the maximum speed of our system is obtained.
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Liu Qiang, Wang Ming, Xia Wei, Li Chuncheng, Hao Hui, Guo Dongmei. Implementation of Real-Time Displacement Precision Measurement Technology for Sinusoidal Phase-Shifting Laser Self-Mixing Interferometer[J]. Acta Optica Sinica, 2014, 34(6): 612011
Category: Instrumentation, Measurement and Metrology
Received: Dec. 19, 2013
Accepted: --
Published Online: Apr. 29, 2014
The Author Email: Qiang Liu (789aiqiang@163.com)