Optical Precision Measurement Technique of Rolling Error

[in Chinese]; [in Chinese]; [in Chinese]

Acta Optica Sinica, Volume. 20, Issue 10, 1403(2000)

[in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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A new method to measure rolling of a precision stage using the two-point method is presented. The rolling of stage and the rolling angle profile can be separated from each other by using the angle sensor output data. Experimental results showed that the rolling can be measured to 0.05" determined by the stability of the rolling measurement system.

Keywords

angle sensor error separate rolling measurement

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[in Chinese], [in Chinese], [in Chinese]. Optical Precision Measurement Technique of Rolling Error[J]. Acta Optica Sinica, 2000, 20(10): 1403

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