Acta Optica Sinica, Volume. 24, Issue 5, 614(2004)
Correction Algorithm of Random Phase Shifting Errors in Phase Measuring Profilometry
In phase-measuring profilometry (PMP), the random phase shifting errors is a important factor that leads to measuring errors. A new correction algorithm of random phase shifting errors is proposed on the basis of five-step. The new algorithm can directly solve random phase shifting errors without solving the phase by approximate treatment. It can greatly reduce the number of iteration and calculation with the intended accuracy. The formulas of the new algorithm is induced and the process to solve random phase shifting is indicated in detail. The validity of this algorithm has been demonstrated by means of compute simulation and experiment. It can greatly reduce the number of iteration and calculation in comparison with the algorithm of In-Bok Kong. The new algorithm can also apply in phase-shifting interferometry.
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[in Chinese], [in Chinese], [in Chinese]. Correction Algorithm of Random Phase Shifting Errors in Phase Measuring Profilometry[J]. Acta Optica Sinica, 2004, 24(5): 614