Laser & Optoelectronics Progress, Volume. 58, Issue 14, 1431001(2021)

Development of a 945-nm Narrowband Filter Based on a Structured Light 3D Imaging Technology

Boyang Wei1、*, Dongmei Liu1, Xiuhua Fu1, Jing Zhang1, Shuang Li2, and Bin Zhou2
Author Affiliations
  • 1College of Photoelectric Engineering, Changchun University of Science and Technology, Changchun, Jilin 130022, China
  • 2Optorun (Shanghai) Co., Ltd., Shanghai 200444, China
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    With the advent of the 5G era, the requirement of structured light 3D imaging technology for the narrowband filter of the invisible light receiving module is significantly increasing. Based on the film design theory of the Fabuli-Boro full-medium type interferometer, Si-H and SiO2 are selected as the high and low refractive index materials. Using the spectral resolution method, the inductively coupled magnetron sputtering technology and DC magnetron sputtering technology are used to alternately form the film to improve its aggregation density. The film's roughness is reduced. Besides, the film-forming temperature influence on the passband spectrum is reduced by the auxiliary anode. The final preparation takes a central wavelength of 945 nm. The average transmittance between 926 nm and 952 nm reaches 98.5%, and the offset of 0°-38° passband is 13 nm.

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    Boyang Wei, Dongmei Liu, Xiuhua Fu, Jing Zhang, Shuang Li, Bin Zhou. Development of a 945-nm Narrowband Filter Based on a Structured Light 3D Imaging Technology[J]. Laser & Optoelectronics Progress, 2021, 58(14): 1431001

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    Paper Information

    Category: Thin Films

    Received: Oct. 16, 2020

    Accepted: Nov. 14, 2020

    Published Online: Jul. 14, 2021

    The Author Email: Wei Boyang (2824155502@qq.com)

    DOI:10.3788/LOP202158.1431001

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