Laser & Optoelectronics Progress, Volume. 58, Issue 14, 1431001(2021)
Development of a 945-nm Narrowband Filter Based on a Structured Light 3D Imaging Technology
With the advent of the 5G era, the requirement of structured light 3D imaging technology for the narrowband filter of the invisible light receiving module is significantly increasing. Based on the film design theory of the Fabuli-Boro full-medium type interferometer, Si-H and SiO2 are selected as the high and low refractive index materials. Using the spectral resolution method, the inductively coupled magnetron sputtering technology and DC magnetron sputtering technology are used to alternately form the film to improve its aggregation density. The film's roughness is reduced. Besides, the film-forming temperature influence on the passband spectrum is reduced by the auxiliary anode. The final preparation takes a central wavelength of 945 nm. The average transmittance between 926 nm and 952 nm reaches 98.5%, and the offset of 0°-38° passband is 13 nm.
Get Citation
Copy Citation Text
Boyang Wei, Dongmei Liu, Xiuhua Fu, Jing Zhang, Shuang Li, Bin Zhou. Development of a 945-nm Narrowband Filter Based on a Structured Light 3D Imaging Technology[J]. Laser & Optoelectronics Progress, 2021, 58(14): 1431001
Category: Thin Films
Received: Oct. 16, 2020
Accepted: Nov. 14, 2020
Published Online: Jul. 14, 2021
The Author Email: Wei Boyang (2824155502@qq.com)