Chinese Journal of Lasers, Volume. 18, Issue 3, 171(1991)
Rotation-speed-controlled layer thickness of soft X-ray multilayer reflectors
Reported here is a new technique, rotation speed-controlled layer thickness monitoring, which can accurately monitor very thin layers for soft X-ray mirrors. Three W/C multilayer (d=10 nm,30 periods and d=8.4nm, 50 periods)are fabricated and characterized by low -angle X-ray diffraction. The results show that the random error of the periodic thicknessis being about 0.1nm.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Rotation-speed-controlled layer thickness of soft X-ray multilayer reflectors[J]. Chinese Journal of Lasers, 1991, 18(3): 171