Acta Optica Sinica, Volume. 17, Issue 6, 745(1997)
A Novel Real-Time Etching Depth Testing System for Micro-Fabrication
A novel real time system for etching depth measurement is demostrated. The system is not sensitive to instability, temperature variation and gaseous flow. The measurement error is small than 0.98%. We realized the real time test of etching depth in vavuum environment. This has practical significance to binary optics micro fabrication.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A Novel Real-Time Etching Depth Testing System for Micro-Fabrication[J]. Acta Optica Sinica, 1997, 17(6): 745